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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11581208 B1

PDFFull Text
Date of Patent:
Feb. 14, 2023

Filed:

Sep. 10, 2020

Substrate treating apparatus

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Noriyuki Kikumoto, Kyoto, JP;

Yuzo Uchida, Kyoto, JP;

Hiroyuki Kawahara, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd.;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

Jason Y Ko

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); B08B 3/04 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6732 (2013.01); B08B 3/041 (2013.01); H01L 21/67051 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01);
Abstract

Disclosed is a substrate treating apparatus that performs a cleaning treatment on substrates. A treating block includes a plurality of treating units in an upper and lower stages, respectively. The treating block includes a front face cleaning unit and a back face cleaning unit, each being at least one in number, in the upper stage. The treating block includes at least one tower unit including the front face cleaning unit and the back face cleaning unit, each being at least one in number, in the lower stage. Moreover, a transportation block is provided that includes a center robot in each of the upper and lower stages.

Find Patent Forward Citations

Kikumoto, Noriyuki. (2023). Substrate treating apparatus (U.S. Patent No. 11581208). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11581208

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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