The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2023

Filed:

Mar. 29, 2018
Applicant:

Excelitas Technologies Corp., Waltham, MA (US);

Inventors:

Eric Baltz, Boulder, CO (US);

Sam Richman, Boulder, CO (US);

Nelson C. Turner, III, Longmont, CO (US);

Assignee:

Excelitas Technologies Corp., Waltham, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01); C23C 14/46 (2006.01); H01J 37/08 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3178 (2013.01); C23C 14/46 (2013.01); H01J 37/08 (2013.01); H01J 37/3007 (2013.01); H01J 2237/081 (2013.01); H01J 2237/3146 (2013.01);
Abstract

Provided herein are deposition systems utilizing coated grids in an ion deposition process which provide more predictable erosion of the coating rather than erosion of the grid itself. Further, coatings may be utilized in which the coating material does not act as a contaminant to the deposition process, thereby eliminating contamination of the sample surface due to deposition of unwanted grid material. Also provided are methods of refurbishing a coated grid by periodically replacing the coating material thus protecting the grid itself and allowing a grid to be used indefinitely.


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