The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2023

Filed:

Dec. 22, 2020
Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Yong Hun Sim, Hwaseong-si, KR;

Jinwook Jung, Pyeongtaek-si, KR;

Seungwon Kim, Yongin-si, KR;

Seokhee Kim, Seoul, KR;

Jaehee Hwang, Suwon-si, KR;

Jun Cheol Park, Incheon, KR;

Assignee:

SEMES CO., LTD., Cheonan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/67 (2006.01); B65G 47/90 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70741 (2013.01); B65G 47/90 (2013.01); G03F 7/70933 (2013.01); H01L 21/67017 (2013.01); H01L 21/6773 (2013.01); H01L 21/67288 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01);
Abstract

A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.


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