The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2023

Filed:

Feb. 18, 2021
Applicant:

Seiko Epson Corporation, Toyko, JP;

Inventors:

Kazuyuki Nagata, Minowa, JP;

Satoru Tanaka, Chino, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/03 (2006.01); G01P 15/08 (2006.01); B60R 21/0132 (2006.01);
U.S. Cl.
CPC ...
G01P 15/032 (2013.01); B60R 21/0132 (2013.01); G01P 15/08 (2013.01); B60R 2021/01325 (2013.01);
Abstract

An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.


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