The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Oct. 21, 2019
Applicant:
Qorvo Biotechnologies, Llc, Plymouth, MN (US);
Inventors:
James Russell Webster, Minnetonka, MN (US);
Peter J. Schiller, Coon Rapids, MN (US);
Richard Allan Van Deusen, St. Paul, MN (US);
Ian Robert Harmon, Golden Valley, MN (US);
Assignee:
Qorvo Biotechnologies, LLC, Plymouth, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/24 (2006.01); G01N 29/02 (2006.01); G01N 33/543 (2006.01); G01N 29/30 (2006.01); C23C 16/06 (2006.01); C23C 16/455 (2006.01); G01N 29/036 (2006.01);
U.S. Cl.
CPC ...
G01N 29/2437 (2013.01); C23C 16/06 (2013.01); C23C 16/45525 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/30 (2013.01); G01N 33/54373 (2013.01); G01N 2291/014 (2013.01); G01N 2291/0255 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0257 (2013.01); G01N 2291/0426 (2013.01);
Abstract
Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.