The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Feb. 19, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Yikai Chen, Santa Clara, CA (US);
Biraja Prasad Kanungo, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 4/134 (2016.01); C23C 4/11 (2016.01); C04B 35/10 (2006.01); C04B 35/48 (2006.01); C04B 35/505 (2006.01);
U.S. Cl.
CPC ...
C23C 4/134 (2016.01); C04B 35/10 (2013.01); C04B 35/48 (2013.01); C04B 35/505 (2013.01); C23C 4/11 (2016.01); Y10T 428/26 (2015.01);
Abstract
An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, AlO, AlN, YO, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of YO, YAlO, YAlOor a solid-solution of YOmixed with at least one of ZrO, AlO, HfO, ErO, NdO, NbO, CeO, SmOor YbO. The plasma-sprayed ceramic coating can further include splats.