The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2023

Filed:

Sep. 06, 2017
Applicant:

Mitsubishi Materials Electronic Chemicals Co., Ltd., Akita, JP;

Inventors:

Kensuke Kageyama, Akita, JP;

Takashi Konishi, Akita, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01B 21/076 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
C01B 21/076 (2013.01); G03F 7/0047 (2013.01); C01P 2006/12 (2013.01); C01P 2006/60 (2013.01);
Abstract

A zirconium nitride powder which has a specific surface area of 20 to 90 m/g as measured by a BET method, has a peak corresponding to zirconium nitride but does not have a peak corresponding to zirconium dioxide, a peak for lower zirconium oxide or a peak corresponding to lower zirconium oxynitride in an X-ray diffraction profile, and the light transmittance X at 370 nm is at least 18%, the light transmittance Y at 550 nm is 12% or less and the ratio (X/Y) of the light transmittance X at 370 nm to the light transmittance Y at 550 nm is 2.5 or more in the transmission spectra of a dispersion that contains the powder at a concentration of 50 ppm.


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