The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Nov. 07, 2017
Applicant:
Teijin Frontier Co., Ltd., Osaka, JP;
Inventors:
Tateki Yamauchi, Osaka, JP;
Mie Kamiyama, Osaka, JP;
Assignee:
TEIJIN FRONTIER CO., LTD., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); D04H 1/46 (2012.01); D04H 1/542 (2012.01); H01L 21/306 (2006.01); H01L 21/304 (2006.01); D04H 1/541 (2012.01); D04H 1/4382 (2012.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); D04H 1/4383 (2020.05); D04H 1/43828 (2020.05); D04H 1/43835 (2020.05); D04H 1/43838 (2020.05); D04H 1/46 (2013.01); D04H 1/542 (2013.01); D04H 1/5412 (2020.05); D04H 1/5416 (2020.05); H01L 21/304 (2013.01); H01L 21/30625 (2013.01);
Abstract
The present invention addresses the problem of providing: a polishing pad that is long-lasting, has a high polish rate, and is capable of producing a high degree of flatness on polished articles; and a method for manufacturing the polishing pad. The solution provided is to eliminate a sea component from a non-woven fabric that includes a binder fabric and a sea-island type composite fiber composed of the sea component and an island component, the island component having a diameter of 10-2500 nm, and to add a polymer elastic body to the non-woven fabric.