The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Nov. 14, 2019
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventor:
Chienliu Chang, Los Altos, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); B06B 1/02 (2006.01); H01L 41/04 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/08 (2006.01); H01L 41/29 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); G06V 40/13 (2022.01);
U.S. Cl.
CPC ...
B06B 1/0666 (2013.01); B06B 1/0215 (2013.01); B06B 1/0622 (2013.01); G06V 40/1306 (2022.01); H01L 41/042 (2013.01); H01L 41/0475 (2013.01); H01L 41/0533 (2013.01); H01L 41/0825 (2013.01); H01L 41/29 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); B06B 2201/70 (2013.01);
Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a layer of piezoelectric material that is activated and sensed by an electrode and a conductive plane layer. The conductive plane layer may be electrically connected to processing circuitry by a via that extends through the piezoelectric layer. One or more isolation trenches extend through the conductive plane layer to isolate the conductive plane layer from other conductive plane layers of adjacent PMUT devices of a PMUT array.