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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11577276 B1

PDFFull Text
Date of Patent:
Feb. 14, 2023

Filed:

Nov. 14, 2019

Piezoelectric micromachined ultrasound transducer device with multi-layer etched isolation trench

Applicant:

Invensense, Inc., San Jose, CA (US);

Inventor:

Chienliu Chang, Los Altos, CA (US);

Assignee:

INVENSENSE, INC., San Jose, CA (US);

Attorneys:

Haley Guiliano LLP

Joshua Van Hoven

Stefan D. Osterbur

Primary Examiner:

Ermias T Woldegeorgis

Int. Cl.
CPC ...
B06B 1/06 (2006.01); B06B 1/02 (2006.01); H01L 41/04 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/08 (2006.01); H01L 41/29 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); G06V 40/13 (2022.01);
U.S. Cl.
CPC ...
B06B 1/0666 (2013.01); B06B 1/0215 (2013.01); B06B 1/0622 (2013.01); G06V 40/1306 (2022.01); H01L 41/042 (2013.01); H01L 41/0475 (2013.01); H01L 41/0533 (2013.01); H01L 41/0825 (2013.01); H01L 41/29 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); B06B 2201/70 (2013.01);
Abstract

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a layer of piezoelectric material that is activated and sensed by an electrode and a conductive plane layer. The conductive plane layer may be electrically connected to processing circuitry by a via that extends through the piezoelectric layer. One or more isolation trenches extend through the conductive plane layer to isolate the conductive plane layer from other conductive plane layers of adjacent PMUT devices of a PMUT array.

Find Patent Forward Citations

Quick Actions:

Chang, Chienliu. (2023). Piezoelectric micromachined ultrasound transducer device with multi-layer etched isolation trench (U.S. Patent No. 11577276). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11577276

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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