The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2023
Filed:
Mar. 21, 2022
Newsonic Technologies, Shenzhen, CN;
Xudong He, Shenzhen, CN;
Newsonic Technologies, Shenzhen, CN;
Abstract
An electrode structure of a resonator and a fabrication method for the electrode structure of the resonator are provided. The electrode structure includes a piezoelectric layer. An electrode metal layer, a dielectric layer, a protrusion/frame metal layer and an etching passivation layer are sequentially arranged above the piezoelectric layer. An air gap is formed between the dielectric layer and the protrusion/frame metal layer, and the air gap is located at an electrode edge. Through the air gap between the dielectric layer and the protrusion/frame metal layer above the piezoelectric layer, an electrode protrusion/frame structure of the resonator with an edge air gap is formed, which serves as an electrode part. When the resonator is working, through the air gap, a transverse sound wave can be reflected back to the resonator and be bound in a resonator body. This greatly increases the Q factor and working performance of the resonator.