The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2023

Filed:

May. 21, 2020
Applicant:

Persimmon Technologies Corporation, Wakefield, MA (US);

Inventor:

Scott Wilkas, Lexington, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); B65G 47/92 (2006.01); H02K 7/075 (2006.01); B25J 11/00 (2006.01); B25J 9/04 (2006.01); B25J 9/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 9/041 (2013.01); B25J 9/105 (2013.01); B25J 11/0095 (2013.01); B65G 47/92 (2013.01); H01L 21/67742 (2013.01); H02K 7/075 (2013.01);
Abstract

An apparatus including a drive having motors and at least two coaxial drive shafts; an arm connected to the drive, where the arm is configured to support at least one substrate thereon; and a transmission connected between the drive and the arm, where the transmission includes an eccentric bearing and a linkage, where the linkage is connected between a first one of the coaxial drive shafts and the arm, where the eccentric bearing is connected to a second one of the coaxial drive shafts, where the arm comprises an aperture, where the eccentric bearing is located in the aperture, and where the eccentric bearing is configured to contact the arm in the aperture.


Find Patent Forward Citations

Loading…