The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2023
Filed:
Aug. 13, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Nobuto Kawahara, Utsunomiya, JP;
Yutaka Mita, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); B29C 59/02 (2006.01); B29C 33/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 33/424 (2013.01); B29C 59/02 (2013.01); H01L 21/6715 (2013.01); H01L 21/681 (2013.01);
Abstract
An imprint apparatus that molds an imprint material on a substrate with a mold, the imprint apparatus including a applying device that includes a discharge surface in which a discharge opening is formed, the applying device applying the imprint material to the substrate through the discharge opening, and a measuring device that measures the position of the discharge opening by having the measuring device measure a position of an uneven structure formed in a protruded shape or a recessed shape with respect to a direction perpendicular to the discharge surface.