The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2023

Filed:

Sep. 10, 2020
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Takeshi Yamane, Tsukuba Ibaraki, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/115 (2006.01); G02B 7/04 (2021.01); H01L 31/14 (2006.01); G02B 7/182 (2021.01); G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
G02B 7/04 (2013.01); G02B 5/08 (2013.01); G02B 7/182 (2013.01); H01L 31/115 (2013.01); H01L 31/14 (2013.01);
Abstract

An imaging device of an embodiment comprises an aperture that transmits imaging light applied to a sample, a detector including a linear sensor comprising a linear light receiving surface extending in a first direction, a first image forming element that collects components of the imaging light in the first direction and forms an image on the light receiving surface with a first wave front aberration amount, and a second image forming element that collects components of the imaging light in a second direction orthogonal to the first direction and forms an image on the light receiving surface with a second wave front aberration amount smaller than the first wave front aberration amount.


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