The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2023
Filed:
Feb. 18, 2021
Applicant:
Azbil Corporation, Tokyo, JP;
Inventors:
Yusuke Niimura, Chiyoda-ku, JP;
Takuya Ishihara, Chiyoda-ku, JP;
Masaru Soeda, Chiyoda-ku, JP;
Masashi Sekine, Chiyoda-ku, JP;
Assignee:
AZBIL CORPORATION, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0047 (2013.01);
Abstract
A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.