The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2023
Filed:
Aug. 06, 2018
Applicant:
Skc Solmics Co., Ltd., Gyeonggi-do, KR;
Inventors:
Sunghoon Yun, Gyeonggi-do, KR;
Jang Won Seo, Busan, KR;
Jaein Ahn, Gyeonggi-do, KR;
Jong Wook Yun, Gyeonggi-do, KR;
Hye Young Heo, Gyeonggi-do, KR;
Assignee:
SKC solmics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/22 (2012.01); B24B 37/20 (2012.01); B24B 37/24 (2012.01);
U.S. Cl.
CPC ...
B24B 37/22 (2013.01); B24B 37/205 (2013.01); B24B 37/24 (2013.01);
Abstract
An embodiment relates to a polishing pad which is used in a chemical mechanical planarization (CMP) process and has excellent airtightness, wherein the polishing pad is excellent in airtightness of a window opening and thus can prevent water leakage that may occur during a CMP process.