The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2023
Filed:
Nov. 14, 2019
Applicant:
Bfly Operations, Inc., Burlington, MA (US);
Inventors:
Lingyun Miao, Fremont, CA (US);
Keith G. Fife, Palo Alto, CA (US);
Jianwei Liu, Fremont, CA (US);
Jonathan M. Rothberg, Guilford, CT (US);
Assignee:
BFLY OPERATIONS, INC., Burlington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); B81B 3/001 (2013.01); B81C 1/00984 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0392 (2013.01); B81C 2201/0109 (2013.01); B81C 2201/0125 (2013.01); B81C 2201/0176 (2013.01);
Abstract
A method of forming an ultrasonic transducer device includes forming an insulating layer having topographic features over a lower transducer electrode layer of a substrate; forming a conformal, anti-stiction layer over the insulating layer such that the conformal layer also has the topographic features; defining a cavity in a support layer formed over the anti-stiction layer; and bonding a membrane to the support layer.