The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Dec. 17, 2018
Applicant:

King Abdullah University of Science and Technology, Thuwal, SA;

Inventors:

Muhammad Mustafa Hussain, Hercules, CA (US);

Nazek Mohamad El-Atab, Thuwal, SA;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 29/66 (2006.01); H01L 29/08 (2006.01); H01L 27/11582 (2017.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7926 (2013.01); H01L 27/11582 (2013.01); H01L 29/66833 (2013.01); H01L 29/7831 (2013.01);
Abstract

A memory cell includes a substrate and a body including plural layers. The body has an inner body and an outer body, and the body is formed on top of the substrate. A nanotube trench is formed vertically in the body and extends to the substrate. A nanotube structure is formed in the nanotube trench. The nanotube trench divides the body into the inner body and the outer body and the nanotube structure is mechanically separated from the inner body and the outer body by a tunnel oxide layer, a charge trapping layer, and a blocking oxide layer.


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