The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Sep. 08, 2017
Applicant:

Plansee SE, Reutte, AT;

Inventors:

Michael Eidenberger-Schober, Breitenwang, AT;

Joerg Winkler, Breitenwang, AT;

Michael O'Sullivan, Ehenbichl, AT;

Assignee:

Plansee SE, Reutte, AT;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C22C 1/04 (2006.01); C22C 27/04 (2006.01); B22F 3/15 (2006.01); B22F 3/18 (2006.01); B22F 3/24 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); B22F 3/15 (2013.01); B22F 3/24 (2013.01); C22C 1/045 (2013.01); C22C 27/04 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01); H01J 37/3491 (2013.01); B22F 2003/185 (2013.01); B22F 2003/248 (2013.01); B22F 2201/01 (2013.01); B22F 2301/20 (2013.01); B22F 2998/10 (2013.01);
Abstract

A sputtering target containing molybdenum and at least one metal from the group tantalum and niobium. The average content of tantalum and/or niobium is from 5 to 15 at % and the molybdenum content is greater than or equal to 80 at %. The sputtering target has at least a matrix with an average molybdenum content of greater than or equal to 92 at % and particles which are composed of a solid solution containing at least one metal from the group of tantalum and niobium, and molybdenum, with an average molybdenum content of greater than or equal to 15 at % and are embedded in the matrix. There is also described a method of producing a sputtering target.


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