The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Dec. 17, 2021
Applicants:
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-fu Fan, Fremont, CA (US);
Inventors:
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-Fu Fan, Fremont, CA (US);
Assignee:
BORRIES PTE. LTD., Singapore, SG;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); B08B 7/00 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); B08B 7/0035 (2013.01); H01J 37/244 (2013.01);
Abstract
The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising an in-column plasma generator for selectively cleaning BSE detector and BF/DF detector. The plasma generator is located between a lower pole piece of objective lens and the BF/DF detectors, but outside trajectory area of the charged-particles from the sample stage to the BF/DF detector.