Computing system with discriminative classifier for determining similarity of a monitored gas delivery process

Abstract

A gas delivery apparatus is provided, comprising a system controller configured to collect valve position information and sensor information from at least a plurality of the sensors and valves, store the valve position information and sensor information into the monitored gas delivery process data, and execute the discriminative classifier including a first artificial intelligence (AI) model configured to extract features in a first input image of the monitored gas delivery process; a second AI model configured to extract features in a second input image of a golden gas delivery process; and a contrastive loss function configured to calculate a similarity between the first input image and the second input image based on outputs of the first AI model and the second AI model, and output a repeatability confidence value based on a similarity index between the first input image and the second input image.