The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Jan. 14, 2020
Applicant:

Tiansheng Zhou, Edmonton, CA;

Inventor:

Tiansheng Zhou, Edmonton, CA;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/085 (2013.01); B81C 1/00603 (2013.01); G02B 26/0841 (2013.01); B81B 2201/033 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0136 (2013.01);
Abstract

A micromirror comprising a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis. A first comb drive with a first portion fixed relative to the mirror and a second portion fixed relative to the mount, and the first comb drive are adapted to actuate the mirror about the first axis. A first support structure pivotally attached to the mount by a second pivoting structure that permits pivotal movement of the mount relative to the first support structure about a second axis, and the second axis is non-parallel to the first axis. A second comb drive with a first portion fixed relative to the mount and a second portion fixed relative to the first support structure, and the second comb drive is adapted to actuate the mount about the second axis.


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