The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Apr. 24, 2019
Applicant:
Figaro Engineering Inc., Minoo, JP;
Inventors:
Assignee:
FIGARO ENGINEERING INC., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/121 (2013.01); G01N 27/123 (2013.01);
Abstract
A gas detector uses a MEMS gas sensor having: a substrate provided with a cavity and an insulating film over the cavity; a metal oxide semiconductor and a heater both provided on the insulating film. A drive circuit operates the heater with a predetermined period for a predetermined pulse duration in order to heat the metal oxide semiconductor. The drive circuit halts operation of the heater or elongates the period when a humidity sensor detects that the atmosphere is humid.