The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
May. 25, 2017
Applicants:
The Regents of the University of Colorado, Denver, CO (US);
Drs Network & Imaging Systems, Llc, Dallas, TX (US);
Inventors:
Steven M. George, Boulder, CO (US);
Victor M. Bright, Boulder, CO (US);
Joseph J. Brown, Honolulu, HI (US);
Jonas Gertsch, Boulder, CO (US);
Nathan Thomas Eigenfeld, Boulder, CO (US);
George Skidmore, Richardson, TX (US);
Assignees:
The Regents of the University of Colorado, Denver, CO (US);
DRS Network & Imaging Systems, LLC, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B05D 7/24 (2006.01); C23C 16/01 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/311 (2006.01); H01L 21/3065 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
B81C 1/00531 (2013.01); B05D 7/24 (2013.01); B82Y 40/00 (2013.01); C23C 16/01 (2013.01); C23C 16/403 (2013.01); C23C 16/45555 (2013.01); H01L 21/3065 (2013.01); H01L 21/30655 (2013.01); H01L 21/311 (2013.01); H01L 21/31122 (2013.01); H01L 21/31144 (2013.01);
Abstract
The present invention relates to the unexpected discovery of novel methods of preparing nanodevices and/or microdevices with predetermined patterns. In one aspect, the methods of the invention allow for engineering structures and films with continuous thickness equal to or less than 50 nm.