The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Jan. 22, 2018
Applicant:

Nitto Denko Corporation, Ibaraki, JP;

Inventors:

Toru Iseki, Ibaraki, JP;

Kohei Doi, Ibaraki, JP;

Mitsuhiro Kanada, Ibaraki, JP;

Kazumichi Kato, Ibaraki, JP;

Hideyuki Tokuyama, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 20/26 (2006.01); C09J 7/10 (2018.01); B01J 20/28 (2006.01); B01J 20/30 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B01J 20/262 (2013.01); B01J 20/28033 (2013.01); B01J 20/3007 (2013.01); C09J 7/10 (2018.01); H01L 21/6836 (2013.01); C09J 2483/00 (2013.01);
Abstract

Provided is an adsorption temporary fixing sheet having a sufficient shear adhesive strength in a direction parallel to its surface, and having a weak adhesive strength in a direction vertical to the surface. Also provided is a method of producing such adsorption temporary fixing sheet. The adsorption temporary fixing sheet includes a foam layer including an open-cell structure, wherein, when a silicon chip vertical adhesive strength of a surface of the foam layer after 20 hours at each of such different temperatures as −40° C., 23° C., or 125° C. is represented by V1 (N/1 cm□), V2 (N/1 cm□), or V3 (N/1 cm□) and when a silicon chip shearing adhesive strength of the surface of the foam layer after 20 hours at each of the different temperatures (−40° C., 23° C., or 125° C.) is represented by H1 (N/1 cm□), H2 (N/1 cm□), or H3 (N/1 cm□), relationships of V1<H1, V2<H2, and V3<H3 are satisfied.


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