The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Jan. 31, 2020
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Seth J. Bamesberger, Austin, TX (US);
Ozkan Ozturk, Round Rock, TX (US);
Christopher Ellis Jones, Austin, TX (US);
Se-Hyuk Im, Austin, TX (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/768 (2006.01); H01L 21/321 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7684 (2013.01); H01L 21/32115 (2013.01); H01L 21/67253 (2013.01);
Abstract
A superstrate for planarizing a substrate. The superstrate includes a body having a first side having a contact surface and a second side having a central portion and a peripheral portion surrounding the central portion. The peripheral portion includes a recessed region.