The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Dec. 07, 2016
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01); C08F 220/28 (2006.01); C08F 220/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0392 (2013.01); C08F 220/1802 (2020.02); C08F 220/281 (2020.02); C08F 220/282 (2020.02); C08F 220/283 (2020.02); G03F 7/039 (2013.01); G03F 7/0397 (2013.01); G03F 7/30 (2013.01); G03F 7/38 (2013.01);
Abstract
A photoresist composition comprising: a resin which has a structural unit represented by formula (I): wherein Rrepresents a hydrogen atom, a halogen atom, or a C1 to C6 alkyl group which optionally has a halogen atom, and Rrepresents a C1 to C42 hydrocarbon group which optionally has a substituent; an alkali-soluble resin; an acid generator; and a solvent.