The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2023

Filed:

Mar. 30, 2021
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventor:

Akira Tanaka, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01N 27/04 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 27/08 (2013.01); G01N 27/041 (2013.01); H01L 22/14 (2013.01);
Abstract

A resistance mapping device includes: a first chip including a first surface, a second surface positioned at a side opposite to the first surface, and a plurality of first electrodes provided at the first surface; a second chip including a third surface facing the first surface, a fourth surface positioned at a side opposite to the third surface, and a plurality of second electrodes provided at the third surface; and a measurement part, the measurement part being configured to measure a resistance of a portion of a measurement object, the portion of the measurement object being between the first electrode and the second electrode that correspond to each other among the plurality of first electrodes and the plurality of second electrodes, and acquire mapping data in which measured values of the resistances are associated with positions of the measurement object corresponding to the plurality of first electrodes.


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