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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11561145 B1

PDFFull Text
Date of Patent:
Jan. 24, 2023

Filed:

Oct. 01, 2020

Sensor membrane structure with insulating layer

Applicant:

Nuvoton Technology Corporation, Hsinchu, TW;

Inventors:

Chung-Lung Hsu, Hsinchu, TW;

Kuang-Chu Chen, Hsinchu, TW;

Peng-Chan Hsiao, Taoyuan, TW;

Han-Ying Liu, Hsinchu, TW;

Assignee:

NUVOTON TECHNOLOGY CORPORATION, Hsinchu Science Park, TW;

Attorney:

Muncy, Geissler, Olds & Lowe, P.C.

Primary Examiner:

Lisa M Caputo

Assistant Examiner:

Nigel H Plumb

Int. Cl.
CPC ...
G01L 7/08 (2006.01); G01L 9/00 (2006.01); B81B 7/02 (2006.01);
U.S. Cl.
CPC ...
G01L 7/082 (2013.01); G01L 9/0072 (2013.01); B81B 7/02 (2013.01); B81B 2201/0264 (2013.01);
Abstract

A sensor membrane structure is provided. The sensor membrane structure includes a substrate, a first insulating layer, and a device layer. The substrate has a first surface and a second surface that is opposite to the first surface. A cavity is formed on the first surface, an opening is formed on the second surface, and the cavity communicates with the opening. The cavity and the opening penetrate the substrate in a direction that is perpendicular to the first surface. The first insulating layer is disposed on the first surface of the substrate. The device layer is disposed on the first insulating layer. The first insulating layer is disposed for protecting the sensor membrane structure from overetched and remain stable during the etching process, increasing the yield of the sensor membrane structure.

Find Patent Forward Citations

Hsu, Chung-Lung. (2023). Sensor membrane structure with insulating layer (U.S. Patent No. 11561145). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11561145

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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