The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Sep. 28, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 21/28 (2006.01); G01C 19/5733 (2012.01); G01C 19/5747 (2012.01); G01C 21/16 (2006.01);
U.S. Cl.
CPC ...
G01C 21/28 (2013.01); G01C 19/5733 (2013.01); G01C 19/5747 (2013.01); G01C 21/16 (2013.01);
Abstract
A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.