The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Jul. 13, 2017
Ngk Spark Plug Co., Ltd., Nagoya, JP;
Kohei Mitsuya, Inuyama, JP;
Hideo Tange, Inuyama, JP;
Motoki Hotta, Kasugai, JP;
Takamichi Ogawa, Nagoya, JP;
NGK SPARK PLUG CO., LTD., Nagoya, JP;
Abstract
A first ceramic member and a second ceramic member are joined together at a lower joining temperature while reducing the loss of bond strength. A method for producing a semiconductor production device component includes a step of providing a first ceramic member including an AlN-based material, a step of providing a second ceramic member including an AlN-based material, and a step of joining the first ceramic member and the second ceramic member to each other by thermally pressing the first ceramic member and the second ceramic member to each other via a joint agent including EuO, GdOand AlOdisposed between the first ceramic member and the second ceramic member.