The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Nov. 09, 2017
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Inventors:
Tae Kyung Lee, Suwon-si, KR;
Jin Suk Son, Suwon-si, KR;
Sung Sun Kim, Suwon-si, KR;
Je Hong Kyoung, Suwon-si, KR;
Hwa Sun Lee, Suwon-si, KR;
Ran Hee Shin, Suwon-si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H01L 41/16 (2006.01); H01L 41/39 (2013.01); H01L 41/29 (2013.01); H01L 41/187 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
H03H 9/17 (2013.01); H01L 41/16 (2013.01); H01L 41/183 (2013.01); H01L 41/187 (2013.01); H01L 41/29 (2013.01); H01L 41/39 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/173 (2013.01); H03H 2003/021 (2013.01);
Abstract
A film bulk acoustic resonator includes: a first electrode disposed on a substrate; a piezoelectric body disposed on the first electrode and including AlN to which a dopant is added; and a second electrode disposed on the piezoelectric body and facing the first electrode such that the piezoelectric body is interposed between the second electrode and the first electrode, wherein the dopant includes either one of 0.1 to 24 at % of Ta and 0.1 to 23 at % of Nb.