The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Sep. 09, 2020
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventor:
Yoshinori Kumura, Tokyo, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/36 (2006.01); H01L 45/00 (2006.01); H01L 27/24 (2006.01); H01L 27/22 (2006.01); H01L 27/11512 (2017.01);
U.S. Cl.
CPC ...
H01L 45/146 (2013.01); H01L 27/224 (2013.01); H01L 27/24 (2013.01); H01L 27/2409 (2013.01); H01L 45/1253 (2013.01); H01L 45/165 (2013.01); H01L 45/1675 (2013.01); H01L 27/11512 (2013.01); H01L 29/36 (2013.01);
Abstract
According to one embodiment, a method of manufacturing a memory device including a silicon oxide and a variable resistance element electrically coupled to the silicon oxide, includes: introducing a dopant into the silicon oxide from a first surface of the silicon oxide by ion implantation; and etching the first surface of the silicon oxide with an ion beam.