The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2023

Filed:

Oct. 26, 2020
Applicant:

AU Optronics Corporation, Hsin-Chu, TW;

Inventors:

Shuo-Hong Wang, Hsin-Chu, TW;

Chun-Nan Lin, Hsin-Chu, TW;

Chia-Tsung Wu, Hsin-Chu, TW;

Chi-Ting Kuo, Hsin-Chu, TW;

Ko-Jui Lee, Hsin-Chu, TW;

Chia-Hung Li, Hsin-Chu, TW;

Chia-Ming Chang, Hsin-Chu, TW;

Assignee:

AU OPTRONICS CORPORATION, Hsin-Chu, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/423 (2006.01); H01L 21/285 (2006.01); G02F 1/1362 (2006.01); G02F 1/1368 (2006.01); H01L 29/49 (2006.01); H01L 29/45 (2006.01); H01L 21/3213 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G02F 1/136286 (2013.01); G02F 1/1368 (2013.01); H01L 21/28568 (2013.01); H01L 27/124 (2013.01); H01L 27/1262 (2013.01); H01L 29/42384 (2013.01); H01L 29/4908 (2013.01); G02F 1/136295 (2021.01); H01L 21/31133 (2013.01); H01L 21/32134 (2013.01); H01L 29/45 (2013.01);
Abstract

A metal structure includes a patterned molybdenum tantalum oxide layer and a patterned metal layer. The patterned molybdenum tantalum oxide layer is disposed on a first substrate, in which the patterned molybdenum tantalum oxide layer includes about 2 to 12 atomic percent of tantalum. Both of an atomic percent of molybdenum and an atomic percent of oxygen of the patterned molybdenum tantalum oxide layer are greater than the atomic percent of tantalum of the patterned molybdenum tantalum oxide layer. The patterned metal layer is disposed on the patterned molybdenum tantalum oxide layer.


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