The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2023

Filed:

Jul. 29, 2020
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Christian Wald, Munich, DE;

Sebastian Kibler, Munich, DE;

Martin Wackerle, Munich, DE;

Yuecel Congar, Munich, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01F 11/08 (2006.01); F16K 99/00 (2006.01);
U.S. Cl.
CPC ...
G01F 11/08 (2013.01); F16K 99/0015 (2013.01); F16K 99/0048 (2013.01);
Abstract

A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.


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