The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Sep. 16, 2019
Applicant:
Purdue Research Foundation, West Lafayette, IN (US);
Inventors:
Mukerrem Cakmak, West Lafayette, IN (US);
Armen Yildirim, West Lafayette, IN (US);
Rahim Rahimi, West Lafayette, IN (US);
Saeed Mohammadi, Zionsville, IN (US);
Ali Shakouri, West Lafayette, IN (US);
Assignee:
Purdue Research Foundation, West Lafayette, IN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/193 (2006.01); G01L 1/18 (2006.01); G01L 9/06 (2006.01); H01L 41/047 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 41/193 (2013.01); G01L 1/18 (2013.01); G01L 9/06 (2013.01); H01L 41/0472 (2013.01); H01L 41/0805 (2013.01); H01L 41/0825 (2013.01); H01L 41/09 (2013.01); H01L 41/1132 (2013.01); H01L 41/1876 (2013.01);
Abstract
A sensor is disclosed which includes a piezoelectric layer, a piezoresistive layer, one or more electrode layers coupled to the piezoelectric layer and to the piezoresistive layer, the piezoelectric layer configured to provide an electrical signal in response to application of a dynamic disturbance, and the piezoresistive layer configured to provide a change in resistivity in response to application of a static disturbance.