The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2023

Filed:

Jul. 30, 2018
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Masaya Yoshida, Himeji, JP;

Kenji Noguchi, Kobe, JP;

Hiroyuki Okada, Kakogawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B25J 9/00 (2006.01); B25J 19/02 (2006.01); B65G 47/80 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01); B25J 9/16 (2006.01); B25J 9/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); B25J 9/0096 (2013.01); B25J 9/104 (2013.01); B25J 9/1694 (2013.01); B25J 11/0095 (2013.01); B25J 19/02 (2013.01); B65G 47/80 (2013.01); H01L 21/68707 (2013.01); B65G 2201/0297 (2013.01); G05B 2219/31081 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/50391 (2013.01);
Abstract

The method includes the steps of: detecting a part, of a surface of a target, that is located on an inner circumferential side of a predetermined circle centered on a rotation axis and passing the target, by an object detection sensor, at plural rotation positions when at least one of a rotation position of the target about the rotation axis on a substrate placement portion and a rotation position of a detection area about a robot reference axis is changed; calculating a quantity correlated with an index length representing a distance from the robot reference axis to the target when the target is detected by the object detection sensor, for each rotation position; and calculating the positional relationship between the robot reference axis and the rotation axis on the basis of, among the rotation positions, the one at which the quantity correlated with the index length is maximized or minimized.


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