The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Jun. 18, 2019
Sumitomo Chemical Company, Limited, Tokyo, JP;
Yukako Anryu, Osaka, JP;
Koji Ichikawa, Osaka, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
A salt capable of producing a resist pattern with excellent line edge roughness is represented by formula (I): wherein, Rrepresents —(X—O)—R, and o represents an integer of 0 to 6, Rrepresents a hydrocarbon group having 1 to 12 carbon atoms, Xrepresents a divalent hydrocarbon group having 2 to 12 carbon atoms, Rrepresents an alkyl group having 1 to 12 carbon atoms or the like, I represents an integer of 0 to 3, and when I is 2 or more, a plurality of Rmay be the same or different from each other, Rand Reach represent a hydrogen atom or the like, m and n each represent 1 or 2, Xrepresents a single bond, —CH—, —O— or —S—, and Rand Reach represent an alkyl group having 1 to 4 carbon atoms which has a fluorine atom or the like.