The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Mar. 09, 2020
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Susumu Iida, Yoshikawa Saitama, JP;
Satoshi Tanaka, Kawasaki Kanagawa, JP;
Takayuki Uchiyama, Yokkaichi Mie, JP;
Assignee:
KIOXIA Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/45 (2006.01); G01B 15/00 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
G01B 15/00 (2013.01); H01L 29/045 (2013.01); G01B 2210/56 (2013.01);
Abstract
A pattern according to an embodiment includes first and second line patterns, each of the first and second line patterns extends in a direction intersecting a <111> direction and has a side surface, the side surface has at least one {111} crystal plane, the side surface of the first line pattern has a first roughness, and the side surface of the second line pattern has a second roughness larger than the first roughness.