The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2023

Filed:

Jul. 06, 2018
Applicant:

Edwards Japan Limited, Chiba, JP;

Inventors:

Hideo Fukami, Chiba, JP;

Masatoshi Ishibashi, Chiba, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/52 (2020.01); F04D 27/00 (2006.01); F04D 19/04 (2006.01); G01K 1/143 (2021.01); G01R 31/54 (2020.01);
U.S. Cl.
CPC ...
F04D 27/007 (2013.01); F04D 19/042 (2013.01); F04D 19/048 (2013.01); G01K 1/143 (2013.01); G01R 31/52 (2020.01); G01R 31/54 (2020.01); G01K 2217/00 (2013.01);
Abstract

A vacuum pump includes a control unit that monitors and controls a motor and a magnetic bearing, each being stored in a pump body. A temperature-adjustment function unit measures a temperature of the pump body by at least one temperature sensor disposed in the pump body and controls at least one heater or solenoid controlled valve based on the temperature. The temperature-adjustment function unit includes a first terminal capable of connecting or disconnecting the temperature sensor and a second terminal capable of connecting or disconnecting one of the heater and the solenoid controlled valve. A self-diagnosis unit capable of conducting a self-diagnosis of whether an input signal to the first terminal has been normally inputted or whether the signal has been normally outputted from the second terminal.


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