The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Jun. 15, 2018
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventors:
Hannu Kattelus, Vtt, FI;
Tauno Vähä-Heikkilä, Vtt, FI;
Assignee:
Teknologian Tutkimuskeskus VTT Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0086 (2013.01); B81C 1/00698 (2013.01); H01L 28/60 (2013.01); B81B 2201/016 (2013.01); B81B 2201/0221 (2013.01); B81B 2203/04 (2013.01); B81C 2201/016 (2013.01); B81C 2201/0176 (2013.01);
Abstract
A micro structure with a substrate having a top surface; a first electrode with a horizontal orientation parallel to the top surface of the substrate, wherein the first electrode is embedded within the substrate so that a top surface of the first electrode coincides with the top surface of the substrate; a dielectric layer arranged on the top surface of the first electrode; and a second electrode arranged above the dielectric layer.