The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Oct. 05, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Koji Asakawa, Kawasaki Kanagawa, JP;
Shinobu Sugimura, Yokohama Kanagawa, JP;
Assignee:
KIOXIA Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/00 (2006.01); B29C 59/02 (2006.01); B29C 33/38 (2006.01); G03F 7/00 (2006.01); H05K 3/00 (2006.01); B29L 31/34 (2006.01); B29K 105/00 (2006.01); B29K 105/24 (2006.01);
U.S. Cl.
CPC ...
B29C 59/022 (2013.01); B29C 33/3842 (2013.01); B29C 59/002 (2013.01); G03F 7/0002 (2013.01); B29K 2105/0058 (2013.01); B29K 2105/24 (2013.01); B29K 2995/0069 (2013.01); B29L 2031/3425 (2013.01); H05K 3/0014 (2013.01); H05K 2203/0121 (2013.01);
Abstract
According to one embodiment, a template includes a base body, and a first film. The base body has a first surface and a second surface. The first surface includes silicon oxide and spreads along a first plane. The second surface crosses the first plane. The first film includes aluminum oxide. A direction from the second surface toward the first film is aligned with a direction perpendicular to the second surface. A thickness of the first film along the direction perpendicular to the second surface is not less than 0.3 nm and not more than 10 μm. The first surface includes an unevenness.