The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Dec. 16, 2020
Applicant:
Daihen Corporation, Osaka, JP;
Inventor:
Tatsuya Morii, Osaka, JP;
Assignee:
DAIHEN Corporation, Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
H03H 7/40 (2006.01); H03H 7/00 (2006.01);
U.S. Cl.
CPC ...
H03H 7/40 (2013.01); H03H 7/004 (2013.01);
Abstract
An impedance adjustment device includes a variable capacitor unit. A microcomputer changes the capacitance value of the variable capacitor unit by switching PIN diodes included in n capacitor circuits on or off separately. Thus, the impedance on the plasma generator side when viewed from a high frequency power supply is adjusted. When changing the capacitance value of the variable capacitor unit to a target capacitance value, the microcomputer changes the capacitance value. When a predetermined period passes after the change of the capacitance value, the microcomputer changes the capacitance value again.