The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Mar. 15, 2018
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventor:
Hu Meng, Beijing, CN;
Assignee:
Beijing BOE Technology Development Co., Ltd., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); G01L 1/16 (2006.01); H01L 41/27 (2013.01); H01L 41/047 (2006.01); H01L 41/193 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 29/24 (2006.01); G01L 1/22 (2006.01); H01L 29/84 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); G01L 1/16 (2013.01); G01L 1/2293 (2013.01); H01L 27/1248 (2013.01); H01L 29/24 (2013.01); H01L 29/66742 (2013.01); H01L 29/78654 (2013.01); H01L 29/78681 (2013.01); H01L 29/78696 (2013.01); H01L 29/84 (2013.01); H01L 41/0471 (2013.01); H01L 41/193 (2013.01); H01L 41/27 (2013.01); H01L 29/0673 (2013.01);
Abstract
The present disclosure provides a piezoelectric sensor, a pressure detecting device, their manufacturing methods and a detection method. The piezoelectric sensor comprises a thin film transistor located on a substrate and comprising an active layer, and a piezoelectric layer that is in contact with the active layer of the thin film transistor.