The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2023

Filed:

Jul. 11, 2019
Applicant:

Tel Fsi, Inc., Chaska, MN (US);

Inventors:

William Inhofer, Plymouth, MN (US);

Sean Moore, Maple Grove, MN (US);

Todd Maciej, Little Falls, MN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01F 7/16 (2006.01); B25B 11/00 (2006.01); H01F 7/18 (2006.01); H01L 21/67 (2006.01); H01F 7/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); B25B 11/002 (2013.01); H01F 7/081 (2013.01); H01F 7/16 (2013.01); H01F 7/18 (2013.01); H01L 21/67259 (2013.01);
Abstract

The present invention provides lift pin strategies with a reduced risk of causing contamination due to the up and down actuation of lift pins. The present invention provides a lift pin system that uses electromagnetic actuation strategies in order to raise and lower lift pins. The electromagnetic forces act remotely on the lift pins so that direct contact or coupling of the lift pins to actuation components is not required. This avoids contamination that otherwise would be associated with friction and associated lubricants used for mechanical actuation strategies.


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