The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Apr. 24, 2019
Applicant:
Luxembourg Institute of Science and Technology (List), Esch-sur-Alzette, LU;
Inventors:
Assignee:
LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/40 (2006.01); H01J 49/00 (2006.01); H01J 49/02 (2006.01); H01J 49/06 (2006.01); H01J 49/32 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
H01J 49/40 (2013.01); H01J 49/0004 (2013.01); H01J 49/0031 (2013.01); H01J 49/025 (2013.01); H01J 49/061 (2013.01); H01J 49/067 (2013.01); H01J 49/32 (2013.01); H01J 49/326 (2013.01); H01J 49/421 (2013.01); H01J 2237/24435 (2013.01); H01J 2237/2527 (2013.01);
Abstract
A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.