The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Aug. 02, 2018
Hitachi High-tech Corporation, Tokyo, JP;
Ryo Komatsuzaki, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
The invention provides a charged particle beam device that can accurately move a convergence point of a charged particle beam to a surface of a sample and facilitates a user to grasp a positional relation between the surface of the sample and the convergence point of the charged particle beam. The charged particle beam device according to the invention includes: an electron optics system configured to irradiate a sample table with a charged particle beam; a movable stage on which the sample table is to be placed; a sample chamber that accommodates the movable stage; a detector configured to detect a signal from a sample placed on the sample table; a camera configured to capture an image of the sample table and the sample; an extraction means configured to extract outer shape information relating to outer shapes of the sample table and the sample from the image captured by the camera; a control unit configured to control the movable stage based on the outer shape information; and a display unit configured to display an image relating to the outer shape information together with the image captured by the camera.