The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Mar. 25, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Satoshi Iwatani, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a stage driving apparatus for driving a stage, the apparatus comprising: a linear motor including a stator having a plurality of coils arrayed along a driving direction of the stage, and a mover provided with the stage; and a controller configured to control the linear motor, wherein the mover includes a permanent magnet provided on one of an upper side and a lower side of the plurality of coils, and an electromagnet provided on the other, the stator includes a yoke member provided to cover the electromagnet side of the plurality of coils, and the controller controls driving of the stage in the driving direction while floating the mover relative to the stator by controlling energization to the plurality of coils and the electromagnet.