The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Jun. 30, 2021
Applicant:
Meta Platforms Technologies, Llc, Menlo Park, CA (US);
Inventors:
Giuseppe Calafiore, Woodinville, WA (US);
Tingling Rao, Bellevue, WA (US);
Ankit Vora, Bothell, WA (US);
Peter Topalian, Seattle, WA (US);
Assignee:
META PLATFORMS TECHNOLOGIES, LLC, Menlo Park, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); F21V 8/00 (2006.01);
U.S. Cl.
CPC ...
G02B 6/0065 (2013.01); G02B 6/0016 (2013.01); G02B 6/0038 (2013.01); G03F 7/001 (2013.01); G03F 7/0002 (2013.01);
Abstract
The disclosure provides high refractive index ceramic material nanoimprint lithography (NIL) gratings having a relatively lower amount of carbon compared to traditional NIL gratings, and methods of making and using thereof, and devices including such gratings. The ceramic material includes one or more of titanium oxide, zirconium oxide, hafnium oxide, tungsten oxide, zinc tellurium, gallium phosphide, or any combination or derivative thereof.