The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Jul. 21, 2017
Applicant:
Seoul National University R&db Foundation, Seoul, KR;
Inventors:
Assignee:
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); G01N 27/04 (2006.01); G01N 1/28 (2006.01); G01N 23/04 (2018.01); G01N 23/06 (2018.01); H01L 21/02 (2006.01); H01L 21/304 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
G01N 27/041 (2013.01); G01N 1/28 (2013.01); G01N 23/04 (2013.01); G01N 23/06 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02488 (2013.01); H01L 21/02527 (2013.01); H01L 21/02568 (2013.01); H01L 21/02631 (2013.01); H01L 21/308 (2013.01); H01L 21/3046 (2013.01); H01L 21/30604 (2013.01); G01N 2223/04 (2013.01); G01N 2223/418 (2013.01);
Abstract
The present invention relates to a method for manufacturing a sample for thin film property measurement and analysis, and a sample manufactured thereby and, more specifically, to: a method for manufacturing a sample capable of measuring or analyzing various properties in one sample; and a sample manufactured thereby.