The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Aug. 26, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Eric D. Wilson, Rockport, MA (US);
Steven Anella, West Newbury, MA (US);
D. Jeffrey Lischer, Acton, MA (US);
James McLane, Beverly, MA (US);
Bradley M. Pomerleau, Beverly, MA (US);
Dawei Sun, Lynnfield, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.